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Industrial Line
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ECSx3080/Al/NUM/RT
Nanopositioner made from Aluminum with integrated optoelectronic encoder and crossed-roller bearings for ambient conditions. Travel range: 50 mm-
50 mm
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24 kg
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0 .. 100 °C
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ECSx3080/StSt/NUM+/HV
Nanopositioner made from stainless steel with integrated optoelectronic encoder and crossed-roller bearings for high vacuum conditions. Travel range: 50 mm-
1E-8 mbar
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50 mm
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24 kg
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0 .. 100°C
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ECSx3080/StSt/NUM+/UHV
Nanopositioner made from stainless steel with integrated optoelectronic encoder and crossed-roller bearings for UHV conditions. Travel range: 50 mm-
5E-11 mbar
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50 mm
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24 kg
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0 .. 100°C
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