ECSx3030/StSt/NUM+/UHV

Nanopositioner made from stainless steel
with integrated optoelectronic encoder
and crossed-roller bearings
for UHV conditions.
Travel range: 20 mm
  • 5E-11 mbar
  • 9 kg
  • 0 .. 100°C
  • 20 mm
Art. No.: 1011435

Ready for shipment
(from order confirmation): 16 weeks

$5,610.00
Excl. 19% Tax, excl. Shipping Cost

Product Description

Details

The ECSx3030 has the smallest footprint of attocube's Industrial Line nano drives. It provides high resolution positioning over a travel range of 20 mm. For xyz-positioning, two ECS drives are mounted on top of each other in perpendicular orientation and a third one is added with a L-bracket. Its high accuracy is achieved with crossed roller bearings.

 

Technical Specifications

Technology

travel mechanism

positioner type

linear

Size and Dimensions

width [mm]

30

length [mm]

30

height [mm]

9.5

maximum length [mm]

30

maximum width [mm]

51.6

maximum height [mm]

9.5

weight (aluminium version) [g]

29

Coarse Positioning Mode

input voltage range [V]

0 - 60

typical actuator capacitance @ 300 K [µF]

1.15

travel range (step mode) [mm]

20

maximum drive velocity @ 300 K [mm/s]

4.5

Fine Positioning Mode

fine positioning range @ 300 K [µm]

1.6

fine positioning resolution

sub-nm

input DC voltage range @ 300 K [V]

0 - 60

Materials

positioner body

stainless steel

actuator

PZT ceramics

connecting wires

copper, jacket: RT: silicon, HV/UHV: fiberglass

bearings

stainless steel

Load (@ ambient conditions)

maximum load [N]

90

maximum dynamic force along the axis [N]

1

Mounting

no. of through holes at the top

4

diameter of through holes at the top [mm]

2.2

type of thread at the top

M2

no. of threads at the bottom

4

type of thread at the bottom

M2.5 x 2 mm

no. of threads for load on top

12

type of thread for load on top

M2 x 2.3 mm

Compatibility with Electronics

ECC100 piezo positioning controller

all versions

Working Conditions

mounting orientation

arbitrary

Accuracy of Movement

repeatability of step sizes

typ. forward / backward step asymmetry

10 %

Position Encoder

readout mechanism

optoelectronic sensor

sensor power (when measuring) [mW]

50

wavelength of illumination [nm]

870

sensor resolution

1 nm

repeatability

50 nm

absolute accuracy

< 0.01% of travel range

Connectors and Feedthroughs

connector type

15-pin D-Sub connector

cable

50 cm cable with connector

electrical feedthrough solution

EVFT/HV, EVFT/UHV

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