ECSx3060/StSt/NUM+/UHV

Nanopositioner made from stainless steel
with integrated optoelectronic encoder
and crossed-roller bearings
for UHV conditions.
Travel range: 35 mm
  • 5E-11 mbar
  • 35 mm
  • 18 kg
  • 0 .. 100°C
Art. No.: 1011441

Ready for shipment
(from order confirmation): 16 weeks

$6,187.50
Excl. 19% Tax, excl. Shipping Cost

Product Description

Details

The ECSx3060 provides high-resolution positioning over a travel range of 35 mm. The integrated optoelectronic encoder enables ultra precise position control over the entire travel range. Its high guiding accuracy is achieved with crossed roller bearings.

 

Technical Specifications

Technology

travel mechanism

positioner type

linear

Size and Dimensions

width [mm]

length [mm]

30

height [mm]

9.5

maximum length [mm]

30

maximum width [mm]

96.6

maximum height [mm]

9.5

weight (aluminium version) [g]

59

Coarse Positioning Mode

input voltage range [V]

0 - 60

typical actuator capacitance @ 300 K [µF]

1.15

travel range (step mode) [mm]

35

maximum drive velocity @ 300 K [mm/s]

4.5

Fine Positioning Mode

fine positioning range @ 300 K [µm]

1.6

fine positioning resolution

sub-nm

input DC voltage range @ 300 K [V]

0 - 60

Materials

positioner body

stainless steel

actuator

PZT ceramics

connecting wires

copper, jacket: RT: silicon, HV/UHV: fiberglass

bearings

stainless steel

Load (@ ambient conditions)

maximum load [N]

180

maximum dynamic force along the axis [N]

1

Mounting

no. of through holes at the top

4

diameter of through holes at the top [mm]

2.2

type of thread at the top

M2

no. of threads at the bottom

4

type of thread at the bottom

M2.5 x 2 mm

no. of threads for load on top

12

type of thread for load on top

M2 x 2.3 mm

Compatibility with Electronics

ECC100 piezo positioning controller

Working Conditions

mounting orientation

arbitrary

Accuracy of Movement

repeatability of step sizes

typ. forward / backward step asymmetry

10 %

Position Encoder

readout mechanism

optoelectronic sensor

sensor power (when measuring) [mW]

50

wavelength of illumination [nm]

870

sensor resolution

1 nm

repeatability

50 nm

absolute accuracy

< 0.01% of travel range

Connectors and Feedthroughs

connector type

15-pin D-Sub connector

cable

50 cm cable with connector

electrical feedthrough solution

EVFT/HV, EVFT/UHV

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