ECSxy5050/Al/NUM/RT

Monolithic xy nanopositioner
made from aluminum
with integrated optoelectronic encoder
and crossed-roller bearings
for ambient conditions.
Travel range (x,y): 25 mm
  • 1E-4 mbar
  • 25 mm
  • 109 g
  • 0 - 55 °C
Art. No.: 1011873

Ready for shipment
(from order confirmation): 16 weeks

$6,154.50
Excl. 19% Tax

Product Description

Details

The ECSxy5050 is dedicated for horizontal movement with a drive force of up to 2N. It provides high-resolution positioning over a travel range of 25 mm. The integrated optoelectronic encoder enables ultra precise position control over the entire travel range. Its high guiding accuracy is achieved with crossed roller bearings.

Technical Specifications

Technology

travel mechanism

inertial piezo drive

positioner type

linear

Size and Dimensions

width [mm]

50

length [mm]

50

height [mm]

16.4

maximum length [mm]

75

maximum width [mm]

75

maximum height [mm]

16.4

weight [g]

Coarse Positioning Mode

input voltage range [V]

  • - 0 - 100
  • - 0 - 45

typical actuator capacitance @ 300 K [µF]

0.72

travel range (step mode) [mm]

25

maximum drive velocity @ 300 K [mm/s]

4.5

Fine Positioning Mode

fine linear positioning range @ 300 K [µm]

1.6

fine positioning resolution

sub-nm

input DC voltage range @ 300 K [V]

0 - 120

Materials

positioner body

Aluminum

actuator

PZT ceramics

connecting wires

copper, jacket: RT: Fluoropolymer

bearings

stainless steel

Load (@ ambient conditions)

maximum load [N]

150

maximum dynamic force along the axis [N]

2

Mounting

no. of through holes at the top

no. of threads at the bottom

no. of threads for load on top

Compatibility with Electronics

Working Conditions

mounting orientation

arbitrary

temperature range

  • - 0..100°C

Accuracy of Movement

repeatability of step sizes

typ. forward / backward step asymmetry

10 %

Position Encoder

readout mechanism

optoelectronic sensor

encoded travel range

entire travel

sensor power (when measuring) [mW]

300

wavelength of illumination [nm]

870

sensor resolution

1 nm

repeatability

50 nm (bidirectional)

absolute accuracy

< 0.01% of travel range

Connectors and Feedthroughs

connector type

14-pole connector

cable

50 cm cable with connector

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