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Technology |
|
|---|---|
travel mechanism |
inertial piezo drive |
type of positioner |
linear |
Size and Dimensions |
|
width [mm] |
50 |
length [mm] |
50 |
height [mm] |
9.5 |
maximum length [mm] |
50 |
maximum width [mm] |
81.6 |
maximum height [mm] |
9.5 |
weight (aluminium version) [g] |
70 |
weight (stainless steel version) [g] |
149 |
Coarse Positioning Mode |
|
typical actuator capacitance @ 300 K [µF] |
1.11 |
travel range (step mode) [mm] |
30 |
maximum drive velocity @ 300 K [mm/s] |
4.5 |
Fine Positioning Mode |
|
fine linear positioning range @ 300 K [µm] |
1.6 |
fine positioning resolution |
sub-nm |
input DC voltage range @ 300 K [V] |
0 - 60 |
Materials |
|
positioner body |
Aluminum |
actuator |
PZT ceramics |
connecting wires |
copper, jacket: RT: silicon, HV/UHV: fiberglass |
bearings |
stainless steel |
Load (@ ambient conditions) |
|
maximum load [N] |
150 |
maximum dynamic force along the axis [N] |
1 |
Mounting |
|
no. of through holes at the top |
4 |
diameter of through holes at the top [mm] |
2.2 |
type of thread at the top |
M2 |
no. of threads at the bottom |
4 |
type of thread at the bottom |
M2.5 x 2 mm |
no. of threads for load on top |
12 |
type of thread for load on top |
M2 x 2.3 mm |
Compatibility with Electronics |
|
Working Conditions |
|
mounting orientation |
arbitrary |
Accuracy of Movement |
|
repeatability of step sizes |
typically 5 % over full range |
typ. forward / backward step asymmetry |
10 % |
Position Encoder |
|
readout mechanism |
optoelectronic sensor |
encoded travel range |
entire travel |
sensor power (when measuring) [mW] |
300 |
wavelength of illumination [nm] |
870 |
sensor resolution |
1 nm |
repeatability |
50 nm (bidirectional) |
absolute accuracy |
< 0.01% of travel range |
Connectors and Feedthroughs |
|
connector type |
14-pole connector |
cable |
50 cm cable with connector |
